ACOUSTIC
MEMS LAB

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- DC Sputter System: High power Plasma Sputter coater with Rotary Stage (3 Heads).
- Plasma Cleaner System: Low pressure plasma system. Process development, Plasma cleaner, Plasma asher, Plasma etcher, Plasma activation
- Gas Mixing Chamber: 2 Channel with flowmeters, Ceramic coating processes
- Microscope 40x+
- 4 GHz Network Analyser
- 1.3 GHz Network Analyser
- 1.5 GHz Spectrum Analyser
- 0-220 MHz RF Amplifier (50 dB)
- 1 GHz RF Signal Generator
- 200 MHz Arbitrary Function Generator
- 350 MHz 4-Channel Oscilloscope
- 75 MHz Pulser/Receiver with 40 dB amplifier/attenuator
- 8-core, 64 GB RAM Workstation
- 4-core, 32 GB RAM Workstation
- COMSOL, MATLAB Licences
- XYZ stage with 25 µm step size
- 2.2 MHz to 10 MHz Ultrasonic transducers
- 10 MHz linear US transducer arrays
- FPGA and µC kits